A high brightness plasma sputter heavy negative ion source
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
سال: 1989
ISSN: 0168-583X
DOI: 10.1016/0168-583x(89)90528-4